Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse.

Contributor(s):

Material type: Text

TextSeries: Advanced micro & nanosystemsPublication details: Wiesbaden : Wiley-VCH Verlag & Co. KGaA, [2015]Description: 1 online resource : illustrationsContent type:

Media type:

Carrier type:

ISBN:

Subject(s):

Genre/Form:

Additional physical formats: Print version:: Resonant MEMS : fundamentals, implementation and application.DDC classification:

LOC classification:

Online resources:

Tags from this library: No tags from this library for this title. Log in to add tags.

No physical items for this record

Online resource; title from PDF title page (Ebsco, viewed May 11, 2015).

Includes bibliographical references and index.

There are no comments on this title.

to post a comment.