Handbook of optical dimensional metrology [electronic resource] / edited by Kevin Harding.

Contributor(s):

Harding, Kevin G

Material type: Text

TextSeries: Series in optics and optoelectronics (CRC Press)Publication details: Boca Raton : CRC Press, 2013.Description: xiii, 492 p. : illISBN:

9781439854822 (ebook : PDF)

Subject(s):

Genre/Form:

Electronic books.

Additional physical formats: No titleOnline resources:

Distributed by publisher. Purchase or institutional license may be required for access.

Available additional physical forms:

Also available in print edition.

Contents:

pt. 1. Optical metrology : introduction -- pt. 2. Optical metrology of larger objects -- pt. 3. Optical metrology of medium size objects -- pt. 4. Optical micro-metrology of small objects -- pt. 5. Advanced optical micro-metrology methods.

Summary: "The need for faster and more accurate dimensional measurements has sparked the development of a range of laser types and methods with greater computational power. Featuring contributors from industry and academia, this handbook reviews modern optical dimensional measurement technologies and their applications. Covering scales ranging from nanometers to kilometers, it presents the principles, techniques, and devices used in modern optical dimensional metrology. An essential desk reference for metrologists and engineers, the book incorporates data tables and a multitude of available techniques"-- Provided by publisher.

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"A Taylor & Francis book."

Includes bibliographical references and index.

"The need for faster and more accurate dimensional measurements has sparked the development of a range of laser types and methods with greater computational power. Featuring contributors from industry and academia, this handbook reviews modern optical dimensional measurement technologies and their applications. Covering scales ranging from nanometers to kilometers, it presents the principles, techniques, and devices used in modern optical dimensional metrology. An essential desk reference for metrologists and engineers, the book incorporates data tables and a multitude of available techniques"-- Provided by publisher.

Also available in print edition.

Mode of access: World Wide Web.

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