The science and engineering of microelectronic fabrication /
Campbell, Stephen A., 1954-
The science and engineering of microelectronic fabrication / Stephen A. Campbell. - 2nd ed. - New York : Oxford University Press, c2001 [reprinted 2004]. - xiv, 603 p. : ill. ; 24 cm. - The Oxford series in electrical and computer engineering .
Includes bibliographical references and index.
0195136055
00051022
Semiconductors--Design and construction.
621.38152
The science and engineering of microelectronic fabrication / Stephen A. Campbell. - 2nd ed. - New York : Oxford University Press, c2001 [reprinted 2004]. - xiv, 603 p. : ill. ; 24 cm. - The Oxford series in electrical and computer engineering .
Includes bibliographical references and index.
0195136055
00051022
Semiconductors--Design and construction.
621.38152